a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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Last updated 18 abril 2025


a) Overall view of the CMOS-MEMS low-frequency resonator. (b) Pull

Design, fabrication, characterization and reliability study of

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A reliable CMOS-MEMS platform for titanium nitride composite (TiN

Cross coupled beams CMOS–MEMS resonator for VHF range with

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AlN MEMS filters with extremely high bandwidth widening capability

CMOS-MEMS Resonators

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Electronically controllable frequency trimming technique based on

Micromachines, Free Full-Text

Cross-sectional view of the post-CMOS process flow: (a) Backside
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